Hot-Wire Chemical Vapour Deposition for Silicon Nitride Waveguides
نویسندگان
چکیده
منابع مشابه
Hot-Wire Chemical Vapor Deposition of Silicon and Silicon Nitride for Photovoltaics: Experiments, Simulations, and Applications
Hot-wire chemical vapor deposition is a promising technique for deposition of thin amorphous, polycrystalline, and epitaxial silicon films for photovoltaic applications. Fundamental questions remain, however, about the gas-phase and surface-kinetic processes involved. To this end, the nature of the wire decomposition process has been studied in detail by use of mass spectrometry. Atomic silicon...
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ژورنال
عنوان ژورنال: ECS Transactions
سال: 2016
ISSN: 1938-6737,1938-5862
DOI: 10.1149/07204.0269ecst